Optical Response Chracterization of In2O3/c-Si Made by Spray Pyrolysis | ||
| Iraqi Journal of Applied Physics | ||
| Article 1, Volume 1, Issue 1, March 2005, Pages 11-14 | ||
| Authors | ||
| O.A.A. Sultan; R.A. Ismail | ||
| Abstract | ||
| In2O3 thin films have been deposited on silicon substrate by chemical spray pyrolysis. These films show high transparency in the visible and near-IR regions. Photoresponse of In2O3/c-Si isotype hetero-photodiode without post-deposition heat treatment has been investigated in the visible and infrared regions. Peak response situated at 600nm was observed. External quantum efficiency was 32% at peak response. C-V measurements revealed that the junction was abrupt type and built-in potential around 1eV has been obtained. | ||
| Keywords | ||
| Indium oxide; Crystalline silicon; Spray Pyrolysis; Thin films | ||
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