The Effect of Sputtering Time and Substrate Type on the Structure of Zinc Nanoparticles Prepared by the DC Sputtering Technique

Hadi, Iman H.; Jawad, Muslim F.; Hassoon, Khaleel I.

doi:10.30684/etj.v40i4.2096

	The Effect of Sputtering Time and Substrate Type on the Structure of Zinc Nanoparticles Prepared by the DC Sputtering Technique
Engineering and Technology Journal
Article 8, Volume 40, Issue 4, April 2022, Pages 582-587 PDF (1.03 M)
Document Type: Research Paper
DOI: 10.30684/etj.v40i4.2096
Authors
Iman H. Hadi^* ; Muslim F. Jawad; Khaleel I. Hassoon
Applied Sciences Dept., University of Technology-Iraq, Alsina’a street, 10066 Baghdad, Iraq.
Abstract
Zn thin films have been successfully deposited on two different substrates, FTO and p-type Si (111), with thickness (112, 186) nm at (1 and 8) min, respectively, via DC sputtering technique in this work. Structural properties of the prepared thin films were studied using X-ray diffraction (XRD) and field-emission scanning electron microscopy (FESEM). XRD results showed that the samples have a hexagonal wurtzite structure. From the results of FESEM images, all the samples showed a uniform distribution of granular surface shape morphology. The grain sizes of the Zn thin films were estimated based on measured X-ray diffraction patterns. Zn thin film thicknesses were increased as the sputtering time increased for all substrates. The best result was the deposition of zinc nanoparticles on Si (p-type) at 1 min, where the particle size was at the peak of 7 nm.
Highlights
The samples have a hexagonal wurtzite structure. All the samples showed a uniform distribution of granular surface shape morphology. Zn thin film thicknesses were increased as the sputtering time increased for all substrates. The best result was the deposition of zinc nanoparticles on Si (p-type) at 1 min, where the particle size was at the peak of 7 nm.
Keywords
Metal NPs/Si (111); DC sputtering method; FESEM; XRD diffraction

References
[1] G. K. Salman Effect of Zn substation on structural and magnetic properties of Cu ferrites nanoparticles, Eng. Technol. J., 34 (2016) 882-893. [2] K. Ibrahim, S. Khalid, and K. Idrees Nanoparticles: properties, applications and toxicities, Arabian Journal of Chemistry, 12 (2019) 908-931. [3] I. M. Ibrahim, Sh. I. Sharhan, and F. T. Ibrahim Hydrogen gas sensor of ZnO doping with CuO/PS nanocomposite, Eng. Technol. J., 33 (2015) 1093-1101. [4] A. Attarad, P. Abdul-Rehman, and Z. Muhammad Elemental zinc to zinc nanoparticles: is ZnO NPs crucial for life? Synthesis, toxicological, and environmental concerns, Nanotechnology Reviews, 7 (2018) 413–441. [5] K. Kannan, and M. Manikandan Selection of a suitable method for the preparation of polymeric nanoparticles: Multi-criteria decision making approach, Advanced Pharmaceutical Bulletin, 5 (2015) 57–67. [6] A. M. El Shafey Green synthesis of metal and metal oxide nanoparticles from plant leaf extracts and their applications, A review Green Processing and Synthesis, 9 (2020) 304–339. [7] F. Lin, and W. Wei A Combined Method of r-NPS and t-NPS evaluations for identification of negative triggers of detractors’ experience, Sustainability, 12 (2020) 1652. [8] A. A. Salman, and W. K. Khalef Characterization and photodetector of zinc oxide/Si thin films prepared by spray pyrolysis technique, The 2nd International Conference on Materials, Laser science and Applied physics -ICMLAP, Baghdad, Iraq, 2021. [9] Kh. S. Shaker, and S. S. Shaker Preparation of ZnO like–nanoflower by hydrothermal method, Eng. Technol. J., 35 (2017) 178-181. [10] H. Noureddine, G. Mostefa, D. Mohamed Amine, B. Abdelwaheb, P. Jean-Jacques, and H. Laurent Compositional, structural, morphological, and optical properties of ZnO thin films prepared by PECVD technique, Coatings, 11 (2021) 202. [11] S. M. Al-Jawad, M. M. Ismail, and S. Emad. Effect of hydrothermal reaction temperatures on structural and optical properties of ZnS nanoparticles, Eng. Technol. J., 34 (2016) 808-819. [12] S. S. Shaker, A. H. Mohammed, and M. S. Khalaf Effect of laser pulses on characterization of zinc oxide thin film prepared by PLD, Eng. Technol. J., 36 (2018) 93-97. [13] U. M. Nayef, and M. J. Jasim Characteristics study of ZnO thin films by rapid thermal oxidation treatment technique, Eng. Technol. J., 33 (2015) 37-44. [14] J. N. Bhavana, H. Yoon, K. H. Young, O. J. Ho, S. T Yeon, J. C. Scott, and S. Yoon Effect of zinc acetate concentration on structural, optical and electrical properties of ZnO thin films deposited by electrostatic spray on ITO substrate, Journal of The Electrochemical Society, 159 (2012) 716-721.
Statistics Article View: 169 PDF Download: 199