Langmuir Probe Diagnostics of Low-Pressure Glow Discharge Plasma Using Argon-Nitrogen Mixtures | ||
| Iraqi Journal of Applied Physics | ||
| Article 1, Volume 12, Issue 3, September 2016, Pages 17-26 | ||
| Authors | ||
| Bahaa T. Chiad; Oday A. Hammadi; Firas J. Kadhim; Mohammed K. Khalaf | ||
| Abstract | ||
| In this work, experimental results on Langmuir probe diagnostics of low-pressure glow discharge plasma using argon-nitrogen mixtures are presented. The effect of variation in working pressure on the current-voltage characteristics of Langmuir probe diagnostics in unmagnetized glow-discharge plasma was introduced. The current-voltage characteristics of Langmuir probe diagnostics in glow-discharge plasma were studied at working pressure of 0.7mbar and three different cases (no magnetron, using one magnetron at the cathode, and using dual magnetrons). Similarly, the current-voltage characteristics of Langmuir probe in glow-discharge plasma at three different positions of the Langmuir probe inside plasma volume were presented. The variation of electron temperature and density in plasma with working gas pressure at the center point between the electrodes when dual magnetrons were used was determined. As well, the effect of mixing nitrogen with argon on the Langmuir probe characteristics at total working pressure of 0.7mbar and inter-electrode distance of 4cm was studied. | ||
| Keywords | ||
| Langmuir diagnostics; Plasma parameters; Glow Discharge; Sputtering | ||
|
Statistics Article View: 96 PDF Download: 34 |
||