Current-Voltage Characteristics of DC Plasma Discharges Employed in Sputtering Techniques | ||
| Iraqi Journal of Applied Physics | ||
| Article 1, Volume 12, Issue 3, September 2016, Pages 11-16 | ||
| Authors | ||
| Mohammed K. Khalaf; Oday A. Hammadi; Firas J. Kadhim | ||
| Abstract | ||
| In this work, the current-voltage characteristics of dc plasma discharges were studied. The current-voltage characteristics of argon gas discharge at different inter-electrode distances and working pressure of 0.7mbar without magnetrons were introduced. Then the variation of discharge current with inter-electrode distance at certain discharge voltages without using magnetron was determined. The current-voltage characteristics of discharge plasma at inter-electrode distance of 4cm without magnetron, with only one magnetron and with dual magnetrons were also determined. The variation of discharge current with inter-electrode distance at certain discharge voltage (400V) for the cases without magnetron, using one magnetron and dual magnetrons were studied. Finally, the discharge current-voltage characteristics for different argon/nitrogen mixtures at total gas pressure of 0.7mbar and inter-electrode distance of 4cm were presented. | ||
| Keywords | ||
| Plasma discharge; Magnetron; Glow Discharge; Sputtering | ||
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